P03900 - SEMI P39 - OASISTM – オープン・アートワーク・システム・インターチェンジ・スタンダード（OPEN ARTWORK SYSTEM INTERCHANGE STANDARD） Revision:SEMI P39-0308 - Superseded SECS-II 및 기타 통신 대안들간의

Name: P03900 - SEMI P39 - OASISTM – オープン・アートワーク・システム・インターチェンジ・スタンダード（OPEN ARTWORK SYSTEM INTERCHANGE STANDARD） Revision:SEMI P39-0308 - Superseded SECS-II 및 기타 통신 대안들간의
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Description

SECS-II 및 기타 통신 대안들간의 관계를 보여준다

and description of the SECS-II messages

• Film deposition equipment (CVD

•Parts such as a nut or gripper are not limited to being made of a fluorocarbon material

SEMI D68-0512 (first published)

P03900 - SEMI P39 - OASISTM – オープン・アートワーク・システム・インターチェンジ・スタンダード（OPEN ARTWORK SYSTEM INTERCHANGE STANDARD） Revision:SEMI P39-0308 - Superseded SECS-II 및 기타 통신 대안들간의global Micropatterning Committee2008118global Audits and Reviews Subcommittee20082www. semi. org20083CD ROM20043200511 2001SEMIData Path Task ForceGDSIIGDSIIIC201632 GDSII1 163264 SEMI Data Path Task ForceInternational SematechEDASematech Referenced SEMI Standards None.

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